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2008-03-08 14:07 Guiding light 393×576× (19013 bytes) Spacer patterning: * First pattern * Deposition of mask material * Etching to form sidewall spacers * Removal of first pattern * Etching using remaining spacers as mask * Removal of spacers, leaving final pattern
{{BotMoveToCommons|en.wikipedia|year={{subst:CURRENTYEAR}}|month={{subst:CURRENTMONTHNAME}}|day={{subst:CURRENTDAY}}}} {{Information |Description={{en|Spacer patterning: * First pattern * Deposition of mask material * Etching to form sidewall spacers * R